Microsystems and Nanosystems: Definitions and examples.
Relationships: Between microelectronic, micro-optical, and micro-electro-mechanical technology.
Basic Microelectronic Technology Processes and Modeling:
Thermal oxidation
Dopant diffusion
Ion implantation
Physical and chemical deposition
Lithography
Etching
Fabrication: Examples of microelectronic device fabrication.
Special Processes: For micromechanics and microsensor fabrication.
Micromachining: Surface and bulk processes.
Physical Principles of Sensors:
Operation
Examples of fabrication and operation of physical and biochemical microsensors.
Lab-on-chip technology.
Nanotechnology:
Methods of fabrication at the nanoscale.
Top-down and bottom-up nanofabrication.
Fabrication and quantum properties of nanoparticles and nanowires.
Applications in sensors.
- Teacher: Δημήτριος Τσουκαλάς
ECTS : 5
Language : el
Learning Outcomes : Understand the technology used in the fabrication of integrated circuits.
• Calculate the dopant distribution in silicon after implantation and thermal processes.
• Determine the most suitable conditions for thermal oxide formation, depending on its intended use in the fabrication of a microelectronic device.
• Select the most appropriate deposition process for insulating and conductive layers according to their intended role in an integrated circuit.
• Understand the processes that enable material patterning through lithography and etching.
• Design a sensor based on the physical quantity to be measured, combining the operating physical principle with its fabrication technology.
• Understand micromachining techniques that allow the fabrication of freely moving microstructures (cantilevers, bridges, resonators).
• Recognize how nanotechnology can be combined with micromachining and microtechnology to enhance the sensitivity of chemical and biochemical sensors.